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High vacuum gate valve capable of opening and closing operations at a differential pressure of 0.1 MPa.
The valve can open and close with a differential pressure of 0.1 MPa. - High vacuum gate valve for vacuum sealing applications - Can be opened and closed even with a pressure difference due to the wedge seal.
It can be baked at an open position of 250°C and a closed position of 200°C to remove moisture and maintain an ultra-vacuum state. The seal directly adheres to the plate, preventing the accumulation of debris.
-No lubricant required -Vulcanized seal for DN 63-200 -Easy maintenance
Active in the manufacturing processes of semiconductors and FPDs! A lineup that meets diverse needs is featured.
Our company is engaged in the design and manufacture of "ultra-high and high vacuum valves" used in the production of semiconductors and FPDs. We are currently offering a "comprehensive catalog" that includes various products. We feature a lineup that meets customer demands, including the "True L-Motion Gate Valve" designed for miniaturized semiconductor processes, the "Gate Valve T-Motion" for larger FPD substrates, and the "APC Penduroll Valve" capable of pressure control with low gas flow rates. [Contents Included] ◎ Information on ultra-high and high vacuum valves ◎ Transport gate valves ◎ Exhaust system gate valves ◎ Options *For more details, please refer to the materials. Feel free to contact us with any inquiries.
